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Название: Plasma Electronics: Applications in Microelectronic Device Fabrication
Автор: Toshiaki Makabe, Zoran Lj. Petrovic
Издательство: CRC Press
Год: 2006
Формат: PDF
Страниц: 336
Размер: 10,22 МБ
Язык: English
Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition, etching, and even process monitoring and diagnosis.