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Название: Directed Self-assembly of Block Co-polymers for Nano-manufacturing
Автор: Edited by Roel Gronheid and Paul Nealey
Издательство: Woodhead Publishing
Год: 2015
Формат: PDF
Страниц: 328
Для сайта: litmy.ru
Размер: 25,14 MB
Язык: English
The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology.