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Название: Laser-Based Nano Fabrication and Nano Lithography
Автор: Koji Sugioka , Ya Cheng (Eds.)
Издательство: Published Papers
Год: 2018
Формат: pdf
Страниц: 156
Размер: 57,7 mb.
Язык: English
The improvement of fabrication resolutions is an eternal challenge for miniaturizing and enhancing the integration degrees of devices. Laser processing is one of the most widely-used techniques in manufacturing due to its high-flexibility, high-speed, and environment-friendliness. The fabrication resolution of laser processing is, however, limited by the diffraction limit. Recently, many efforts have been made to overcome the diffraction limit in nano fabrication. Specifically, combinations of multiphoton absorption by ultrafast lasers and the threshold effect associated with a Gaussian beam profile provide fabrication resolutions far beyond the diffraction limit.