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Автор: Gianluca Piazza and Harmeet Bhugra
Издательство: Springer
Год: 2017
Формат: PDF
Размер: 14 Мб
Язык: английский / English
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS.