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Автор: Yong Ping Xu
Издательство: River Publishers
Год: 2019
Страниц: 314
Язык: английский
Формат: pdf (true)
Размер: 48.7 MB
Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output.