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Автор: Michael Huff
Издательство: Springer
Серия: Microsystems and Nanosystems
Год: 2020
Страниц: 631
Язык: английский
Формат: pdf (true)
Размер: 21.7 MB
Examines and explains the basic processing steps used in MEMS fabrication. This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included.