Название: MEMS Applications in Electronics and Engineering
Автор: Aviru Kumar Basu, Adreeja Basu, Sagnik Ghosh, Shantanu Bhattacharya
Издательство: AIP Publishing
Год: 2023
Страниц: 278
Язык: английский
Формат: pdf (true)
Размер: 18.3 MB

MEMS Applications in Electronics and Engineering is a state-of-the-art resource for scientists and students in sensor/ device research. It provides a thorough overview of the latest applications and devices in nano-scale sensors and their role in diagnostics, consumer electronics, automotive, energy harvesting, and IoT-based applications. It highlights recent developments in MEMS-based sensors and explains the fundamentals, novel processes, and materials of this global area of focus.

The advent of microelectromechanical systems, commonly abbreviated as MEMS, has brought in the advantages of interfacing mechanical components with electronic circuits to realize a complete overall system. The three-dimensional (3D) nature of such mechanical components allows efficient implementation of MEMS devices towards sensing and communication by tapping on to the ability of MEMS devices being displaced under external stimuli. Such a motion of MEMS devices can be detected both electrically and optically. Moreover, the virtue of MEMS fabrication being compatible with complementary metal-oxide semiconductor (CMOS) fabrication technology allows multiple MEMS sensors, actuators, and resonators to be batch fabricated, enabling mass production of MEMS devices with high yield. In some cases, multiple MEMS devices with different target applications are monolithically fabricated on a single chip to reduce parasitic from external electrical connections and at the same time realizing a complete system with small form factor. A way to scale down MEMS devices toward a reduced form factor with better packing density of devices has also been sought through the implementation of nanoelectromechanical systems (NEMS) devices. Transduction principals among MEMS devices can be broadly classified into electrostatic, piezoelectric, piezoresistive, electromagnetic, and optical. Recent technologies such as 3D printing, plasma processing and laser micromachining have provided significant advantages in scaling down from MEMS to NEMS devices.

This timely and essential book:

• Builds knowledge for people working in other domains through its interdisciplinary approach
• Identifies recent technologies from MEMS sensors domains and their efficacy in real-life applications
• Covers relevant topics for the expert as well as foundational information for non-specialists in MEMS technologies

MEMS Applications in Electronics and Engineering is a valuable guide for students, researchers, and faculty engaged in MEMS-related research and research professionals.