Название: Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope
Автор: Huiliang Cao
Издательство: Springer/National Defense Industry Press
Год: 2023
Страниц: 231
Язык: английский
Формат: pdf (true)
Размер: 10.7 MB

This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.

Micro electro mechanical system (MEMS) gyroscope is an important application of MEMS technology in inertia type instruments. It has the advantages of small volume, light weight, low cost, mass production and good impact resistances. It has important practical value and wide application prospect in national economy and national defense and military fields. In particular, the double mass line vibration structure is the main research object of domestic and foreign scientific research institutes. Although the precision of silicon micromechanical gyroscopes has been improved significantly in recent decades, its static and dynamic performance still cannot meet the requirements of medium and high precision fields due to various factors, including the deterioration and drift of gyroscope output signal caused by machining errors: The contradiction between mechanical sensitivity of gyro structure and gyroscope bandwidth; The detection modal dynamic performance needs to be further improved; the temperature characteristics of MEMS gyro are poor. For this purpose, the author compiled this book according to the latest development, and combined it with his research and engineering practice in the field of dual-mass linear vibration silicon-based MEMS gyroscope.

The book is divided into seven chapters: Chap. 1 is “Introduction”, which introduces the basic concept, characteristics and application fields of the dual-mass linear vibration silicon-based MEMS gyroscope, the research status and the research purpose and significance of the book. Chapter 2 is “Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Structure and Working Principle” which mainly introduces the Coriolis effect, gyro dynamics equation, fully decoupled structure design and machining technology of dual-mass linear vibration silicon-based MEMS gyroscope. Chapter 3 is “Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Structure Noise Analysis and System Model” which introduces the main noise in the gyroscope structure, establishes the ideal gyroscope mechanical system model and studies the driving closed-loop loop based on AGC technology; Chap. 4 is “Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Quadrature Error Nulling Technology and Optimization” where the generating mechanism of dual-mass linear vibration MEMS gyroscope quadrature error and its suppression methods are analyzed. Chapter 5 is “Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Sense Closed Loop and Frequency Tuning Technology”. The mode transfer function of dual-mass gyroscope detection is proposed, and the closed-loop controller with bandwidth expansion function is designed, furthermore, the frequency tuning method is introduced. In Chap. 6, “Temperature Influence on MEMS Gyroscope and Suppression Method”, the temperature model, MEMS gyroscope temperature control and temperature compensation technology are introduced. Chapter 7 is “Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope Monitoring Circuit Design and Test Technology” which systematically introduces the test method of the MEMS gyroscope.

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